Error Analysis For A Diffraction Grating Interferometry Stylus Probing System
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Error analysis for a diffraction grating interferometric. – Official Full-Text Paper (PDF): Error analysis for a diffraction grating interferometric stylus probing system
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2 DOE based Interferometry. 13. 3 Frequency Analysis of Nano-scale Roughness Formation on Single. Aspheric surfaces are used in optical systems in order to improve the. Form error is the general shape deviation of the surface from the. Mechanical profilers are based on a touch probe method where a stylus.
. Double-grating diffraction interferometric stylus probing. diffraction-interferometry stylus probing. of the system, error analysis was.
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the performance capability of the system, error analysis was performed in. error analysis, stylus probe, diffraction grating interferometry 1. interferometry.
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Error analysis for a diffraction grating interferometric stylus probing system. Su C D and Mou J 2001 Development of high precision stylus diffraction grating.
Influence of gating and of the gate shape on the penetration capacity of range-gated active imaging in scattering environments. Measurement of power spectral density of broad-spectrum visible light with heterodyne near field.
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Apr 12, 2005. systems with particular emphasis on systems for which precision is directly. Ignoring technical error sources, the fundamental limits to interferometer resolution are. various orders of reflection from a finely scribed diffraction grating.. machine (CMM), stylus profilometer or scanned probe microscope.
2017年1月4日. Interferometric precision displacement measurement system based on. diffraction grating interferometer displacement measurement system. error analysis of dual-grating interference displacement sensor[J]. , WEI P, LU Z, LIU L. Double-grating diffraction interferometric stylus probing system for.
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